@InProceedings{OliveiraGonUedRosRiz:2009:HiPlIm,
author = "Oliveira, Rog{\'e}rio de Moraes and Gon{\c{c}}alves, Jos{\'e}
Am{\'e}rico Neves and Ueda, M{\`a}rio and Rossi, Jos{\'e}
Osvaldo and Rizzo, P. N.",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas
Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais
(INPE)}",
title = "High-temperature plasma immersion ion implantation into metallic
substrates",
year = "2009",
organization = "International Workshop on Plasma-Based Ion Implantation and
Deposition, 10. (PPI\&D).",
abstract = "The temperature of the substrate has strong influence on the
diffusion coefficient of nitrogen ions during PIII performed in
metallic surfaces, which affect the ion implantation profiles and
can lead to the formation of thick implanted layers. In order to
heat conveniently a large spectrum of metals and metallic alloys
in vacuum and in the presence of plasma, as mandatory for
efficient PIII, it is necessary to count on a stable heat source,
able to reach steady temperatures in the range of 400oC to more
than 1000 oC. This has been accomplished in the current experiment
by means of a thermionic cathode composed of a rolled tantalum
foil covered with (Ba,Sr,Ca)O. Work function of this electron
source is around 1.2 eV, which is much lower than 4.5 eV of
typically used tungsten filament. Metallic samples, in this case,
are the anode of the discharge itself, being polarized during the
heating cycle by positive DC voltages about 500V. They are
implanted with negative pulses of 10 kV/300Hz/40{\`{\i}}s.
Comparison among metallic layers treated under distinct
temperature values will be accomplished by evaluating their
corrosion resistance and tribological properties. Samples will
also be analyzed by X-ray diffraction, SEM and XPS.",
conference-location = "S{\~a}o Jos{\'e} dos Campos, SP",
conference-year = "7-11 Sept.",
urlaccessdate = "11 maio 2024"
}